Masters Student

BackgroundThe Mycronic Pattern Generator division develops high-precision mask writers used for manufacturing advanced photomasks in the semiconductor and display industries. These photomasks are used globally, providing cutting-edge production solutions for high-resolution displays and semiconductor chips. Almost all displays you see around you; TV:s, computers, tablets, mobile phones etc. are manufactured using our technology.Achieving the required nanometer-level accuracy in these machines places high demands on the motion control and metrology systems. To meet these demands, several complementary sensors are used to measure and control motion. By combining their data using sensor fusion or multi-sensor estimation techniques, it may be possible to obtain a more robust and comprehensive estimate of the system’s motion state. This thesis will explore and evaluate such methods for potential use in Mycronic’s precision motion systems.ObjectiveThe goal of this thesis is to design, implement, and evaluate a sensor fusion framework that combines encoder, interferometer, and accelerometer data to improve position estimation in precision motion control. The specific objectives are to:Conduct a literature study of sensor fusion methods for precision mechatronic systems (e.g. Extended/Unscented Kalman Filters, complementary filters).Model sensor behavior and key error sources (bias drift, noise, scale factors, alignment, environmental effects).Develop and implement a sensor fusion algorithm in MATLAB, Python or C.Evaluate its performance using simulated and/or measured data from Mycronic’s metrology systems.Analyze accuracy, robustness, and dynamic performance compared to single-sensor approaches.ScopeThe work focuses on modeling, algorithm design, and data analysis. Hardware design or new sensor development is not included. The student(s) will, however, have access to real sensor data and laboratory equipment for testing and validation.RequirementsWe are looking for one or two motivated master’s students with a background in Mechatronics, Control Systems, Electrical Engineering, Engineering Physics, or equivalent disciplines.Start date for the thesis work: To be agreed upon with the selected candidates.Estimated time required per candidate: 30 ECTSContactAndreas Bergström, Manager, andreas.bergström@mycronic.com, +46 (0)728 541 748Samuel Eriksson, Mechatronics Engineer, samuel.eriksson@mycronic.com, +46 (0)701 461 474